Junction gate field-effect transistor (jfet) having source/drain and gate isolation regions

ABSTRACT

A junction gate field-effect transistor (JFET) includes a substrate, a source region formed in the substrate, a drain region formed in the substrate, a channel region formed in the substrate, and at least one gate region formed in the substrate. The channel region connects the source and drain regions. The at least one gate region contacts one of the source and drain regions at an interface, and the at least one gate region is isolated from the other of the source and drain regions. A dielectric layer covers the interface while exposing portions of the gate region and the one of the source and drain regions.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a divisional of U.S. application Ser. No.15/882,796, filed on Jan. 29, 2018, which is a divisional of U.S.application Ser. No. 14/322,193, filed on Jul. 2, 2014, now U.S. Pat.No. 9,882,012, issued on Jan. 30, 2018, which is a continuation-in-partof U.S. application Ser. No. 13/892,960, filed on May 13, 2013, now U.S.Pat. No. 9,287,413, issued on Mar. 15, 2016, which applications arehereby incorporated herein by reference.

BACKGROUND

Junction gate field effect transistors (JFET) provide various usefulcharacteristics, such as low noise, fast switching speed, high powerhandling capability, etc. These characteristics make JFETs a designconsideration in various power applications, such as power amplifiers.

BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not bylimitation, in the figures of the accompanying drawings, whereinelements having the same reference numeral designations represent likeelements throughout. The drawings are not to scale, unless otherwisedisclosed.

FIG. 1 is a perspective, partially cross-sectional view of an n-channelJFET (NJFET) in accordance with some embodiments.

FIG. 2 is a perspective, partially cross-sectional view of a p-channelJFET (PJFET) in accordance with some embodiments.

FIG. 3A is a circuit diagram of a semiconductor device, and FIG. 3B is aperspective, partially cross-sectional view of the semiconductor devicein accordance with some embodiments.

FIG. 4 is a top plan view of a JFET in accordance with some embodiments.

FIG. 5 is a perspective, partially cross-sectional view of a JFET inaccordance with some embodiments.

FIG. 6 is a flow chart of a method of manufacturing an NJFET inaccordance with some embodiments.

FIGS. 7A-7D are cross-sectional views of an NJFET at various stagesduring manufacture in accordance with some embodiments.

FIG. 8 is a flow chart of a method of manufacturing a PJFET inaccordance with some embodiments.

FIG. 9 is a perspective, partially cross-sectional view of an NJFET inaccordance with some embodiments.

FIG. 10 is a perspective, partially cross-sectional view of an NJFET inaccordance with some embodiments.

FIG. 11 is a top plan view of a JFET in accordance with someembodiments.

FIG. 12 is a cross-sectional view of an NJFET in accordance with someembodiments.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments or examples, for implementing different featuresof various embodiments. Specific examples of components and arrangementsare described below to simplify the present disclosure. An inventiveconcept may; however, be embodied in many different forms and should notbe construed as being limited to the embodiments set forth herein. Itwill be apparent, however, that one or more embodiments may be practicedwithout these specific details. Like reference numerals in the drawingsdenote like elements.

In some embodiments, a JFET includes source and drain regions, a channelregion connecting the source and drain regions, and a gate region. Thegate region is configured to cause a depletion region to develop in oneof the source and drain regions in response to a voltage applied to thegate region. This is different from other configurations where the gateregion causes a depletion region to develop in the channel region. AJFET in accordance with some embodiments is a vertical JFET with thegate region at least partially co-elevational with the source and drainregions for reducing the JFET thickness. Further, it is possible tointegrate the manufacturing process of a JFET in accordance with someembodiments in complementary metal-oxide-semiconductor (CMOS) processes,e.g., for making CMOS circuits on the same device or chip as the JFET.

FIG. 1 is a perspective, partially cross-sectional view of an NJFET 100in accordance with some embodiments. The NJFET 100 comprises a substrate110 with a deep n-well (DNW) 112, an n-well (NW) 114 and an isolationregion (STI) 116 formed in the substrate 110 which also has an uppersurface 118. The NJFET 100 further comprises a channel region 120, adrain region 130, a source region 140 and a gate region 150, all ofwhich are formed in the substrate 110. The perspective, partiallycross-sectional view in FIG. 1 illustrates about a half of the NJFET100. The other half (not shown) of the NJFET 100 is structurally similarto the half shown in FIG. 1.

The substrate 110 has a thickness direction Z, and directions X and Ytransverse to each other and also transverse to the thickness directionZ. The substrate 110 comprises an elementary semiconductor, a compoundsemiconductor, an alloy semiconductor, or combinations thereof. Examplesof the elementary semiconductor include, but are not limited to, siliconand germanium. Examples of a compound semiconductor include, but are notlimited to, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and indium antimonide. Examples of the alloysemiconductor include, but are not limited to, SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, and GaInAsP. Other semiconductor materialsincluding group III, group IV, and group V elements are used in someembodiments. In one or more embodiments, the substrate 110 comprises asemiconductor on insulator (SOI), a doped epitaxial layer, a gradientsemiconductor layer, and/or a stacked semiconductor structure with onesemiconductor layer (e.g., Si) overlying another semiconductor layer(e.g., Ge) of a different type. In some embodiments, the substrate 110comprises a p-type doped substrate which is denoted as P-sub in FIG. 1.Examples of p-type dopants in the p-doped substrate 110 include, but arenot limited to, boron, gallium, and indium. In at least one embodiment,the substrate 110 comprises a p-type doped silicon substrate.

The deep n-well 112 and the n-well 114 are formed in the substrate 110.The deep n-well 112 and n-well 114 are weakly doped regions with n-typedopants. Examples of n-type dopants in the deep n-well 112 and/or n-well114 include, but are not limited to, phosphorus and arsenic. The n-well114 extends from the upper surface 118 of the substrate 110 downwardlyin the thickness direction Z of the substrate 110 to contact the deepn-well 112. The deep n-well 112 and n-well 114 together define ann-doped structure that isolates the other components of the NJFET 100from the p-doped substrate 110 and/or other circuitry formed in/on thesubstrate 110. The deep n-well 112 promotes electric current flowingalong the channel region 120. In at least one embodiment, the deepn-well 112 and/or the n-well 114 is/are omitted. The isolation region116 extends from the upper surface 118 of the substrate 110 downwardlyin the thickness direction Z, and around the source region 140 and gateregion 150. The isolation region 116 serves to isolate various regionsof the NJFET 100 as described herein.

The channel region 120 is an n-channel having at least one n-type dopantdoped therein. The drain region 130 is an n-doped region formed at anupper part of the n-well 114 adjacent the upper surface 118 of thesubstrate 110. The source region 140 is also an n-doped region formedadjacent the upper surface 118 of the substrate 110, and above thechannel region 120. The channel region 120 contacts a lower part of then-well 114 and the source region 140. The channel region 120electrically connects the drain region 130 and the source region 140.

The gate region 150 is a p-doped gate disposed above the channel region120. The gate region 150 extends around the source region 140. In thecross-sectional view in FIG. 1, the gate region 150 includes a firstgate region 151 and a second gate region 152 on opposite sides of thesource region 140. The first gate region 151 and second gate region 152have corresponding interfaces 153, 154 with the source region 140. Thefirst gate region 151 and second gate region 152 are isolated from thedrain region 130 by the isolation region 116. The drain region 130, thesource region 140 and the gate region 150 are at least partiallyco-elevational with each other in the thickness direction Z.

The NJFET 100 is a normally on device. During a period in which novoltage is applied to the gate region 150, the NJFET 100 is in a fullyconductive state with the channel region 120 electrically connecting thedrain region 130 and the source region 140. When the NJFET 100 is in theconductive state, electric current is permitted to flow along a currentpath 155 as indicated by the arrows in FIG. 1. Specifically, the currentflows from the source region 140 downwardly in the thickness direction Zto the channel region 120, then flows in a direction X transverse to thethickness direction Z along the channel region 120 to the n-well 114,and then flows upwardly in the thickness direction Z to the drain region130. By applying a reverse bias voltage to the gate region 150, it ispossible to control a width of the current path 155 and, hence, a levelof the current flowing from the source region 140 to the drain region130 via the channel region 120. For the NJFET 100, the reverse biasvoltage is a negative voltage. At a sufficiently high level of thereverse bias voltage, the current path 155 is pinched off and the NJFET100 is switched off.

In particular, during a period in which a reverse bias voltage isapplied to the gate region 150, a depletion region is caused to developin the source region 140 and narrows the width of, or even pinches off,the current path 155. For example, upon application of a reverse biasvoltage, depletion regions 157, 158 are developed in the source region140 above the channel region 120. The depletion regions 157, 158 extendfrom the corresponding interfaces 153, 154 of the first and second gateregions 151, 152 with the source region 140 toward each other in thedirection X transverse to the thickness direction Z of the substrate110. The depletion regions 157, 158 reduce the width of the current path155 and limit a level of the current flowing through the NJFET 100. As alevel of the reverse bias voltage increases, the depletion regions 157,158 increasingly extend toward each other and further reduce the widthof the current path 155. At a sufficient level of the reverse biasvoltage, i.e., a pinch-off voltage, the current path 155 is pinched offand the NJFET 100 is switched off.

In the NJFET 100, the depletion regions are caused to develop in thesource region 140, above the channel region 120. This is different fromother configurations where a depletion region is caused to develop inthe channel region. To cause a depletion region to develop in thechannel region, the other configurations include a bottom gate below thechannel region, and the depletion region is developed and expanded inthe thickness direction of the substrate. The inclusion of a bottom gatebelow the channel region increases the thickness of the device. To thecontrary, a bottom gate is not included in a JFET in accordance withsome embodiments, thereby reducing the device thickness.

One or more electrical characteristics of the NJFET 100 are variable inaccordance with some embodiments by varying a length LS of the sourceregion 140, i.e., the length between the first gate region 151 and thesecond gate region 152. For example, the longer the length LS is, thehigher the pinch-off voltage will be. By varying or controlling thelength LS, the pinch-off voltage will be varied or controlledaccordingly. The variation or control (also referred to herein as“scalability”) of the length LS in the direction X in accordance withsome embodiments is easier than in the other configurations where achannel depth of the channel region is to be controlled or varied in thethickness direction. As a result, it is possible in some embodiments todesign and/or manufacture JFETs with reliable electrical characteristicsand/or without a risk of an unacceptably high or low pinch-off voltage.

It is further possible to integrate JFETs in accordance with someembodiments with CMOS processes, as described herein. The integration ofJFET manufacture in CMOS processes provides low cost solutions forvarious power application modules where JFETs are used. Examples of suchpower application modules include power amplifiers, especially radiofrequency (RF) power amplifiers, e.g., for cell phones or similarwireless devices. In some embodiments, the RF performance of the RFpower amplifiers is enhanced by using a bulk or high resistancesubstrate, such as an 8-12 ohmic Si substrate, as the substrate 110.

FIG. 2 is a perspective, partially cross-sectional view of a PJFET 200in accordance with some embodiments. The PJFET 200 comprises a substrate210 with p-doped bottom region (P-bottom) 212, an n-well (NW) 213, ap-well (PW) 214, a deep n-well (DNW) 215, and an isolation region (STI)216 formed in the substrate 210. A section 217 of the substrate 210 ispositioned between the n-well 213 and the p-well 214. In someembodiments, the section 217 is another isolation region. The n-well213, p-well 214, isolation region 216, and substrate section (orisolation region) 217 extend from an upper surface 218 of the substrate210 downwardly in the thickness direction Z. The PJFET 200 furthercomprises a channel region 220, a source region 230, a drain region 240and a gate region 250, all of which are formed in the substrate 110. Theperspective, partially cross-sectional view in FIG. 2 illustrates abouta half of the PJFET 200. The other half (not shown) of the PJFET 200 isstructurally similar to the half shown in FIG. 2.

In some embodiments, the substrate 210 is similar to the substrate 110of the NJFET 100. For example, the substrate 210 is a p-doped substrate.The p-doped bottom region 212 and the p-well 214 correspond to the deepn-well 112 and the n-well 114 of the NJFET 100. The p-doped bottomregion 212 and p-well 214 are weakly doped regions with p-type dopants.The p-well 214 extends from the upper surface 218 of the substrate 210downwardly in the thickness direction Z to contact the p-doped bottomregion 212. The p-doped bottom region 212 promotes electric currentflowing along the channel region 220. In at least one embodiment, thep-doped bottom region 212 and/or the p-well 214 is/are omitted. Theisolation regions 116, 117 serve to isolate various regions of the PJFET200 as described herein.

The n-well 213 and deep n-well 215 are weakly doped regions with n-typedopants. The n-well 213 extends from the upper surface 218 of thesubstrate 210 downwardly in the thickness direction Z to contact thedeep n-well 215. The n-well 213 extends around the p-well 214, and isisolated from the p-well 214 by the substrate section (or isolationregion) 217. The deep n-well 215 is formed below the p-doped bottomregion 212. In one or more embodiments, the deep n-well 215 contacts thep-doped bottom region 212. In at least one embodiment, the deep n-well215 is spaced from the p-doped bottom region 212. The deep n-well 215and n-well 213 together define an n-doped structure that isolates theother components of the PJFET 200 from the p-doped substrate 210 and/orother circuitry formed in/on the substrate 210.

The channel region 220, source region 230, drain region 240 and gateregion 250 correspond to the channel region 120, drain region 130,source region 140 and gate region 150 of the NJFET 100. The channelregion 220, is a p-channel having at least one p-type dopant dopedtherein. The source region 230 is a p-doped region formed at an upperpart of the p-well 214 adjacent the upper surface 218 of the substrate210. The drain region 240 is also a p-doped region formed adjacent theupper surface 218 of the substrate 210, and above the channel region220. The channel region 220 contacts a lower part of the p-well 214 andthe drain region 240. The channel region 220 electrically connects thesource region 230 and the drain region 240.

The gate region 250 is an n-doped gate disposed above the channel region220. The gate region 250 extends around the drain region 240. In thecross-sectional view in FIG. 2, the gate region 250 includes a firstgate region 251 and a second gate region 252 on opposite sides of thedrain region 240. The first gate region 251 and second gate region 152have corresponding interfaces 253, 254 with the drain region 240. Thefirst gate region 251 and second gate region 252 are isolated from thesource region 230 by the isolation region 216. The source region 230,the drain region 240 and the gate region 250 are at least partiallyco-elevational with each other in the thickness direction Z.

The PJFET 200 operates similarly to the NJFET 100. Specifically, duringa period in which there is no voltage applied to the gate region 250,the PJFET 200 is in a fully conductive state with the channel region 220electrically connecting the source region 230 and the drain region 240.When the PJFET 200 is in the conductive state, electric current ispermitted to flow along a current path 255 as indicated by the arrows inFIG. 2. Specifically, the current flows from the source region 230downwardly in the thickness direction Z to the channel region 220, thenflows in a direction X transverse to the thickness direction Z along thechannel region 220, and then flows upwardly in the thickness direction Zto the drain region 240. During a period in which a reverse biasvoltage, i.e., a positive voltage, is applied to the gate region 250,depletion regions 257, 258 are developed in the drain region 240 abovethe channel region 220. The depletion regions 257, 258 extend from thecorresponding interfaces 253, 254 toward each other in the direction X,and reduce the width of the current path 255 and limit a level of thecurrent flowing through the PJFET 200. As a level of the reverse biasvoltage increases, the depletion regions 257, 258 increasingly extendtoward each other and further reduce the width of the current path 255.At a sufficient level of the reverse bias voltage, i.e., a pinch-offvoltage, the current path 255 is pinched off and the PJFET 200 isswitched off. One or more effects described with respect to the NJFET100 are also obtainable in the PJFET 200 in accordance with someembodiments.

FIG. 3A is a circuit diagram of a semiconductor device 300. Thesemiconductor device 300 includes an NJFET 301 and a PJFET 302. Gateregions of the NJFET 301 and PJFET 302 are connected together, and to aninput node IN for receiving an input signal at the input node IN. Adrain region of the NJFET 301 and a source region of the PJFET 302 areconnected together, and to an output node OUT for outputting an outputsignal at the output node OUT. A source region of the NJFET 301 isconnected to a first voltage terminal VSS to receive a first powersupply voltage, e.g., the ground voltage. A drain region of the PJFET302 is connected to a second voltage terminal VDD to receive a secondpower supply voltage, e.g., a positive power supply voltage.

FIG. 3B is a perspective, partially cross-sectional view of thesemiconductor device 300 in accordance with some embodiments. The NJFET301 and PJFET 302 of the semiconductor device 300 are formed in the samesubstrate 310 which is similar to the substrate 110 or substrate 210.The NJFET 301 is configured similar to the NJFET 100, and the PJFET 302is configured similar to the PJFET 200. The gate regions 150, 250 of theNJFET 301 and PJFET 302 are connected to corresponding to vias 371, 372embedded in one or more dielectric layers (not shown) formed over thesubstrate 310. The vias 371, 372 are connected together and to the inputnode IN by a conductive layer 373. The drain region 130 of the NJFET 301and the source region 230 of the PJFET 302 are to corresponding to vias381, 382 embedded in the one or more dielectric layers formed over thesubstrate 310. The vias 381, 382 are connected together and to theoutput node OUT by a conductive layer 383. The source region 140 of theNJFET 301 is connected to a corresponding via 391 embedded in the one ormore dielectric layers formed over the substrate 310. The via 391 isconnected to the ground voltage terminal VSS by a conductive layer 392.The drain region 240 of the PJFET 302 is connected to a correspondingvia 393. The via 393 is connected to the positive voltage terminal VDDby a conductive layer 394.

The semiconductor device 300 operates as an inverter that inverts theinput signal received at the input node IN, and outputs the invertedsignal as the output signal at the output node OUT. The semiconductordevice 300 further functions as a power amplifier that amplifies anamplitude of the input signal to a higher level of the positive powersupply voltage at the terminal VDD. In accordance with some embodiments,by configuring the NJFET 301 as the NJFET 100 and/or the PJFET 302 asthe PJFET 200, one or more effects described herein with respect to theNJFET 100 and/or PJFET 200 are achievable in the semiconductor device300. One or more further effects, such as low noise, high breakdownvoltage, fast switching speed, etc. are also achievable in thesemiconductor device 300 in accordance with some embodiments.

FIG. 4 is a top plan view of an NJFET 400 in accordance with someembodiments. The NJFET 400 is formed in a substrate 410 having anisolation region 416. The NJFET 400 comprises a drain region 430, asource region 440, and a gate region 450. In some embodiments, thesubstrate 410, isolation region 416, drain region 430, source region 440and gate region 450 correspond to the substrate 110, isolation regions116, drain region 130, source region 140 and gate region 150 of theNJFET 100. The gate region 450 has first and second gate regions 451,452 corresponding to the first and second gate regions 151, 152 of thegate region 150. However, unlike the first gate region 151 and secondgate region 152 which are connected with each other as best seen in FIG.1, the first gate region 451 and second gate region 452 are disconnectedfrom each other as best seen in FIG. 4. In some embodiments, the samegate voltage, e.g., a reverse bias voltage, is applied to both the firstgate region 451 and second gate region 452 in operation. In at least oneembodiment, different gate voltages are applied to the first gate region451 and second gate region 452 in operation, to vary electricalcharacteristics of the NJFET 400. In at least one embodiment, one of thefirst gate region 451 and second gate region 452 is omitted.

Each of the first gate region 451 and second gate region 452 has a gatelength LG. In at least one embodiment, the gate length of the first gateregion 451 is different from the gate length of the second gate region452. The drain region 430 has a drain length LD, and the source region440 has a source length LS. One or more of the gate length LG, the drainlength LD, and the source length LS is/are variable or scalable toachieve intended electrical characteristics for the NJFET 400, whileremaining in compliance with a plurality of design rules to ensure thatthe NJFET 400 can be manufactured. The description and effect(s) of theNJFET 400 are also applicable to a PJFET in accordance with someembodiments.

FIG. 5 is a perspective, partially cross-sectional view of an NJFET 500in accordance with some embodiments. The NJFET 500 is formed in asubstrate 510 having an isolation region 516 and an n-well 514. TheNJFET 500 comprises a drain region 530, a source region 540, and a gateregion 550. In some embodiments, the substrate 510, n-well 514,isolation region 516, drain region 530, source region 540 and gateregion 550 correspond to the substrate 110, n-well 114, isolationregions 116, drain region 130, source region 140 and gate region 150 ofthe NJFET 100. The gate region 550 has first and second gate regions551, 552 corresponding to the first and second gate regions 151, 152 ofthe gate region 150.

At least one of the drain region 530 and source region 540 has acorresponding drain or source enhancement layer. The enhancement layerhas a dopant of the same type as the channel region 520, and a dopingconcentration of the dopant higher than in the channel region 520. Forexample, the drain region 530 has a drain enhancement layer 531 with ann-type dopant, i.e., the same dopant type as the channel region 520. Adoping concentration of the n-type dopant in the drain enhancement layer531 is higher than in the channel region 520. For example, in at leastone embodiment, the n-type dopant in the drain enhancement layer 531 hasa doping concentration of about 100×1014 atoms/cm3 and the n-type dopantin the channel region 520 has a doping concentration of about 450×1012atoms/cm3. The drain enhancement layer 531 is formed in an upper part ofthe n-well 514 and at least partially co-elevational with the first andsecond gate regions 551, 552. In at least one embodiment, the drainenhancement layer 531 contacts the channel region 520. The drain region530 further comprises a drain contact layer 532 which forms an ohmic orschottky contact 534 with the drain enhancement layer 531.

Similar to the drain region 530, the source region 540 includes a sourceenhancement layer 541, and a source contact layer 542 forming an ohmicor schottky contact 544 with the source enhancement layer 541. Thesource enhancement layer 541 has the same dopant type, i.e., n-type, asthe channel region 520, with a higher doping concentration. In at leastone embodiment, the doping concentration of the n-type dopant in thesource enhancement layer 541 is the same as that in the drainenhancement layer 531. In at least one embodiment, the dopingconcentrations of the n-type dopant in the source enhancement layer 541and the drain enhancement layer 531 are different. The sourceenhancement layer 541 is at least partially co-elevational with thefirst and second gate regions 551, 552, and contacts the channel region520. In at least one embodiment, the drain enhancement layer 531 or thesource enhancement layer 541 is omitted. The gate region 550 alsoincludes a gate contact layer 553 which forms an ohmic or schottkycontact 554 with the first and second gate regions 551, 552.

Because the enhancement layers 531 and 541 have higher dopingconcentrations than the channel region 520, the enhancement layers 531and 541 have lower resistances than the channel region 520. The lowerresistances of the enhancement layers 531 and 541 reduce the ONresistance of the NJFET 500. The ohmic or schottky contacts 534, 544,554 further improve electrical performance of the gate region 550. Thedescription and effect(s) of the NJFET 500 are also applicable to aPJFET in accordance with some embodiments.

FIG. 6 is a flow chart of a method 600 of manufacturing an NJFET, andFIGS. 7A-7D are cross-sectional views of the NJFET at various stagesduring the manufacturing method 600, in accordance with someembodiments.

At operation 605 in FIG. 6, a deep n-well and one or more isolationregions are formed in a substrate. For example, as illustrated in FIG.7A, a deep n-well 712 and isolation regions 716, 719 are formed in asubstrate 710. In at least one embodiment, the substrate 710, isolationregion 716, and deep n-well 712 correspond to the substrate 510,isolation region 516 and deep n-well 512 of the NJFET 500. The isolationregion 716 extends around a portion 713 of the substrate 710 where asource region and a gate region of the NJFET are to be formed. Theisolation region 719 extends around the portion 713, the isolationregion 716 and a portion 715 of the substrate 710 where a drain regionof the NJFET is to be formed. In this aspect, the isolation region 719is similar to the substrate section (or isolation region) 217 describedwith respect to FIG. 2.

In some embodiments, the deep n-well 712 is formed in the substrate 710by depositing a photoresist (not shown) over the substrate 710 andpatterning the deposited photoresist to form a mask (not shown) having apattern of the deep n-well 712. The mask is used in an ion implantationperformed to implant an n-type dopant into the substrate 710 to form thedeep n-well 712. In at least one embodiment, the ion implantation iscontrolled by one or more of energy, dose, and implantation angle toimplant the n-type dopant sufficiently deep into the substrate 710. Themask is subsequently removed.

In some embodiments, the isolation regions 716 and 719 are formed in thesubstrate 710 by forming trenches (not shown) in the substrate 710, thenfilling the trenches with an isolation material, such as silicon oxide.The trenches are formed by in at least one embodiment by lithographicand/or etching processes. The depth and/or width of the isolationregions 716 and 719 are selected according to the design and/or intendedelectrical characteristics of the NJFET to be manufactured.

At operation 615 in FIG. 6, an n-channel region is formed in thesubstrate. For example, as illustrated in FIG. 7B, a channel region(NJI) 720 is formed in the section 713 of the substrate 710. In at leastone embodiment, the channel region 720 corresponds to the channel region520 of the NJFET 500. In some embodiments, the channel region 720 isformed by creating a mask and then using the mask in an ion implantationperformed to implant an n-type dopant into the substrate 710. The maskfor forming the channel region 720 is created in a manner similar tothat described with respect to operation 605. The ion implantation forforming the channel region 720 is controlled by one or more of energy,dose, and implantation angle. In at least one embodiment, the dopingconcentration or doping dose for forming the channel region 720 ishigher than that for forming the deep n-well 712.

At operation 625 in FIG. 6, an n-well is formed in the substrate. Forexample, as illustrated in FIG. 7B, an n-well 714 is formed in thesection 715 of the substrate 710. In at least one embodiment, the n-well714 corresponds to the n-well 514 of the NJFET 500. The n-well 714 hasan upper part co-elevational with and confined between the adjacentisolation regions 716, 719. The n-well 714 further has a lower partbelow the isolation regions 716, 719. The lower part of the n-well 714contacts the deep n-well 712 and the channel region 720. The lower partof the n-well 714 extends sideways to be partially located under one orboth of the isolation regions 716, 719. In some embodiments, the n-well714 is formed in a manner similar to that described with respect tochannel region 720, but with a different mask.

At operation 635 in FIG. 6, source and/or drain enhancement layersis/are formed in the substrate. For example, as illustrated in FIG. 7C,drain and source enhancement layers (NJDS) 731, 741 are formed atlocations corresponding to the drain region and the source region of theNJFET to be manufactured. In at least one embodiment, the drain andsource enhancement layers 731, 741 correspond to the drain and sourceenhancement layers 531, 541 of the NJFET 500. The drain enhancementlayer 731 is formed over the upper part of the n-well 714 and betweenthe adjacent isolation regions 716, 719. The drain enhancement layer 731further extends below the isolation regions 716, 719, and has a portionlocated under one or both of the isolation regions 716, 719. In at leastone embodiment, the drain enhancement layer 731 contacts the channelregion 720. The source enhancement layer 741 is formed in a middle partof the section 713 and contacts the channel region 720. In someembodiments, the enhancement layers 731, 741 are formed in a mannersimilar to that described with respect to channel region 720, but with adifferent mask and with a higher dopant concentration.

At operation 645 in FIG. 6, a gate region is formed in the substrate.For example, as illustrated in FIG. 7D, first and second gate regions751, 752 are formed as p-doped regions in the substrate 710. In at leastone embodiment, the first and second gate regions 751, 752 correspond tothe first and second gate regions 551, 552 of the NJFET 500. Each of thefirst and second gate regions 751, 752 contacts the isolation region 716and the source enhancement layer 741. In some embodiments, the first andsecond gate regions 751, 752 are formed in a manner similar to thatdescribed with respect to channel region 720, but with a different maskand with a p-type dopant.

At operation 655 in FIG. 6, a dielectric layer, such as a resistprotective oxide (RPO) layer, is formed over the junction area betweenthe source and gate regions. For example, as illustrated in FIG. 7D, RPOlayers 761, 762 are formed over the corresponding junction areas betweenthe first gate region 751 and the source enhancement layer 741, andbetween the second gate region 752 and the source enhancement layer 741.The RPO layers 761, 762 serve to isolate subsequently formed contactlayers from contacting each other. In at least one embodiment, the RPOlayer is formed by depositing a dielectric material, such as siliconoxide and/or silicon nitride, over the substrate 710, and etching awaythe dielectric material outside the junction areas.

At operation 665 in FIG. 6, one or more of drain, source and gatecontact layers is/are formed over the corresponding to drain, source andgate regions. For example, as illustrated in FIG. 7D, a drain contactlayer 732, a source contact layer 742 and a gate contact layer 753 areformed over the corresponding drain enhancement layer 731, sourceenhancement layer 741, and first and second gate regions 751, 752. In atleast one embodiment, the drain contact layer 732, source contact layer742 and gate contact layer 753 correspond to the drain contact layer532, source contact layer 542 and gate contact layer 553 of the NJFET500. In some embodiments, the drain, source and gate contact layers 732,742 and 753 are silicide layers in ohmic (or schottky) contact with thecorresponding, underlying drain, source and gate regions. Such silicidelayers are formed, in at least one embodiment, by depositing a metal,such as Ti, Co, Ni, etc. over the structure previously formed over thesubstrate 710, annealing the substrate 710 with the structure and thedeposited metal thereon to have the metal react with silicon in thedrain, source and gate regions, and then removing the unreacted metal.The source contact layer 742 and the gate contact layer 753 areseparated from each other by the RPO layers 761, 762. The NJFET is thusobtained.

Further processes are subsequently performed in some embodiments toconnect the NJFET with other circuitry. For example, one or moredielectric layers (not shown) are deposited over the substrate 710 withthe NJFET formed there on, and contact vias 771, 781, 791 are formed inthe one or more dielectric layers to be in electric contact with thecorresponding gate, drain and source contact layers 753, 732, 742. In atleast one embodiment, the contact vias 771, 781, 791 correspond to thevias 371, 381, 391 described with respect to semiconductor device 300.

It is possible to integrate operations of the method 600 formanufacturing the JFET in accordance with some embodiments in CMOSprocesses for manufacturing CMOS circuitry on the same substrate (e.g.,on the same wafer). Two additional masks and the associated ionimplantations are added for forming the channel region and the sourceand/or drain enhancement layers. Thus, it is possible to manufactureJFETs in accordance with some embodiments by CMOS processes, withinsignificant changes to the CMOS processes, thereby obtaining a lowcost product (e.g., power amplifier) with one or more advantages of theJFET as described herein.

FIG. 8 is a flow chart of a method 800 of manufacturing a PJFET inaccordance with some embodiments.

At operation 805, a deep n-well and one or more isolation regions areformed in a substrate, for example, as described with respect tooperation 605.

At operation 815, a p-bottom region and a p-channel are formed in thesubstrate. For example, a p-bottom region 212 and a p-channel 220 areformed in a substrate 210 as described with respect to the PJFET 200.The p-bottom region and p-channel are formed by creating a mask and thenusing the mask in an ion implantation performed to implant a p-typedopant into the substrate, in a manner similar to that described withrespect to operation 615 except for the dopant type. In at least oneembodiment, the p-bottom region and the p-channel are formed by usingthe same mask. In at least one embodiment, the p-type dopantconcentration or dose of the p-bottom region is lower than that of thep-channel.

At operation 825, an n-well and a p-well are formed in the substrate.For example, an n-well 213 and a p-well 214 are formed in the substrate210 as described with respect to the PJFET 200. In at least oneembodiment, the formation of the n-well is similar to operation 625. Theformation of the p-well is similar to the formation of the n-well,except a different mask and a p-type dopant are used.

At operation 835, source and/or drain enhancement layers is/are formedin the substrate. For example, source and/or drain enhancement layerssimilar to the source and/or drain enhancement layers 741, 731 describedwith respect to operation 635 are formed, using similar mask creatingand ion implantation processes, except that a p-type dopant is used.

At operation 845, a gate region is formed in the substrate. For example,gate regions similar to first and second gate regions 751, 752 describedwith respect to operation 645 are formed, using similar mask creatingand ion implantation processes, except that an n-type dopant is used.

At operation 855, a dielectric layer, such as an RPO layer, is formedover the junction area between the drain and gate regions, for example,as described with respect to operation 855.

At operation 865, one or more of drain, source and gate contact layersis/are formed over the corresponding to drain, source and gate regions,for example, as described with respect to operation 865.

The effect(s) of the method 600 is/are also applicable to the method 800accordance with some embodiments.

The above methods include example operations, but they are notnecessarily required to be performed in the order shown. Operations maybe added, replaced, changed order, and/or eliminated as appropriate, inaccordance with the spirit and scope of embodiments of the disclosure.Embodiments that combine different features and/or different embodimentsare within the scope of the disclosure and will be apparent to those ofordinary skill in the art after reviewing this disclosure.

FIG. 9 is a perspective, partially cross-sectional view of an NJFET 900in accordance with some embodiments. Similarly to FIG. 1, theperspective, partially cross-sectional view in FIG. 9 illustrates abouta half of the NJFET 900. The other half (not shown) of the NJFET 900 isstructurally similar to the half shown in FIG. 9. Compared to the NJFET100 described with respect to FIG. 1, the NJFET 900 is formed in asubstrate 910 and has a dielectric layer 960 covering the interface ofthe gate region 150 with the source region 140.

In some embodiments, the substrate 910 comprises an SOI substrate. In atleast one embodiment, the substrate 910 comprises a 5000-10000 ohmic Sisubstrate, i.e., a Si substrate having a resistivity in a range from5000 to 10000 ohm·cm.

In some embodiments, the dielectric layer 960 comprises an RPO materialas described with respect to the RPO layers 761, 762 in FIG. 7D. Thedielectric layer 960 covers the interface between the gate region 150and the source region 140, while exposing other portions of the gateregion 150 and the source region 140 for electrical contact between theNJFET 900 and other circuitry. In at least one embodiment, thedielectric layer 960 completely covers, from above, the entire interfacebetween the gate region 150 and the source region 140. In a plan view ofthe substrate 910 in the example configuration illustrated in FIG. 9,the drain region 130 extends around the gate region 150, the gate region150 extends around the dielectric layer 960, and the dielectric layer960 extends around the source region 140.

An operation of the NJFET 900 is similar to the operation of the NJFET100 described with respect to FIG. 1. For example, when a reverse biasvoltage is applied to the gate region 150, the depletion regions 157,158 are caused to extend from the interface 153, 154 into the sourceregion 140.

Some embodiments provide a PJFET (not shown) which is similar to thePJFET 200 described with respect to FIG. 2, but is formed in a substratesimilar to the substrate 910 and has a dielectric layer similar to thedielectric layer 960 covering the interface between the gate region 250and the drain region 240. An operation of such PJFET is similar to theoperation of the PJFET 200 described with respect to FIG. 2.

In some embodiments, by providing a dielectric layer, such as thedielectric layer 960, over the interface between the gate region and thecorresponding source or drain region of a JFET, the breakdown voltage ofthe JFET is increased. This effect is particularly useful in one or moreembodiments where the substrate of the JFET is a high-resistivitysubstrate, such as an SOI substrate. Specifically, an increased leakagecurrent potentially induces early turning-ON of a parasitic bipolarjunction transistor (BJT) in the JFET, which, in turn, potentiallycauses a burnt-out structure between electrical contacts on top of thegate region and the corresponding source or drain region. By forming adielectric layer between the electrical contacts on top of the gateregion and the corresponding source or drain region, e.g., by formingthe dielectric layer 960 between the electrical contacts on top of thegate region 150 and the source region 140, leakage current is reduced,and the voltage at which the BJT is turned ON is increased, which meansthe JFET has an increased breakdown voltage.

In some embodiments, the width of the dielectric layer is a factor thataffects how the breakdown voltage of the JFET is improved. In at leastone embodiment, the width of the dielectric layer is in a range from 0.5to 5 μm (micron). In some situations, a dielectric layer having a widthsmaller than 0.5 μm is insufficient to reduce leakage current and/orincrease the breakdown voltage. In some situations, a dielectric layerhaving a width larger than 5 μm does not necessarily result in furtherbreakdown voltage improvement, yet such large dielectric layerpotentially consumes excessive material and/or leaves insufficient areasfor electrical contacts on the gate region and/or the correspondingsource or drain region. The described size and material of thedielectric layer are examples. Other arrangements are within the scopeof various embodiments.

FIG. 10 is a perspective, partially cross-sectional view of an NJFET1000 in accordance with some embodiments. Similarly to FIG. 1, theperspective, partially cross-sectional view in FIG. 10 illustrates abouta half of the NJFET 1000. The other half (not shown) of the NJFET 1000is structurally similar to the half shown in FIG. 10. Compared to theNJFET 900 described with respect to FIG. 9, the NJFET 1000 has anisolation region 1016 under the dielectric layer 960.

The isolation region 1016 is arranged between the gate region 150 andthe source region 140. More particularly, the isolation region 1016 isarranged between upper parts of the gate region 150 and the sourceregion 140, while still permitting lower parts of the gate region 150and the source region 140 to contact each other at interfaces 1053, 1054corresponding to interfaces 153, 154 described with respect to FIG. 1.In a plan view of the substrate 910 in the example configurationillustrated in FIG. 10, the drain region 130 extends around the gateregion 150, the gate region 150 extends around the dielectric layer 960and the isolation region 1016, and the dielectric layer 960 and theisolation region 1016 extend around the source region 140. In theexample configuration illustrated in FIG. 10, the dielectric layer 960is narrower than the isolation region 1016, and a portion of theisolation region 1016 is exposed from under the dielectric layer 960.Other width relationships between the dielectric layer 960 and theisolation region 1016 are within the scope of various embodiments. In atleast one embodiment, materials and/or manufacturing processes of theisolation region 1016 are similar to those of the isolation region 116described with respect to FIG. 1. The described configurations of theisolation region 1016 are examples. Other arrangements are within thescope of various embodiments.

An operation of the NJFET 1000 is similar to the operation of the NJFET100 described with respect to FIG. 1. For example, when a reverse biasvoltage is applied to the gate region 150, the depletion regions 1057,1058, corresponding to but smaller than the depletion regions 157, 158described with respect to FIG. 1, are caused to extend from theinterface 1053, 1054 into the source region 140.

Some embodiments provide a PJFET (not shown) which is similar to thePJFET described with respect to FIGS. 2 and 9, but is formed with anisolation region similar to the isolation region 1016. An operation ofsuch PJFET is similar to the operation of the PJFET 200 described withrespect to FIG. 2.

In some embodiments, the presence of an isolation region, such as theisolation region 1016, between the gate region and the correspondingsource or drain region, reduces the strong electrical field that existsat a high operation voltage, results in smaller depletion regionscompared to other structures without such isolation region, and furtherimproves the breakdown voltage of the JFET. In at least one embodiment,an isolation region similar to the isolation region 1016 is formed inone or more of the JFET structures described with respect to FIGS. 1-8,and one or more effects described herein with respect to the isolationregion 1016 is/are also achievable.

FIG. 11 is a top plan view of a JFET 1100 in accordance with someembodiments. Compared to the JFET 400 described with respect to FIG. 4,the NJFET 1100 is formed in a substrate 1110, and includes a dielectriclayer 1160 and an isolation region 1116 under the dielectric layer 1160.In some embodiments, the substrate 1110, dielectric layer 1160 andisolation region 1116 correspond to the substrate 910, dielectric layer960 and isolation regions 1016 and 116 described with respect to FIG.10. The isolation region 1116 has portions 1117, 1118 arranged betweenthe source region 140 and the corresponding first and second gateregions 151, 152. The isolation region 1116 extends around the sourceregion 140, and also around the first and second gate regions 151, 152.One or more effects described with respect to the JFETs 400, 900 and1000 in corresponding FIGS. 4, 9 and 10 are achievable in the JFET 1100in accordance with some embodiments.

FIG. 12 is a cross-sectional view of an NJFET 1200 in accordance withsome embodiments. Compared to the NJFET structure described with respectto FIG. 7D, the NJFET 1200 is formed in a substrate 1210, and includesat least one dielectric layer 1261, 1262 and at least one isolationregion 1296, 1297 under the corresponding dielectric layer 1261, 1262.In some embodiments, the substrate 1210, the at least one dielectriclayer 1261, 1262, and at least one the isolation region 1296, 1297correspond to the substrate 910, dielectric layer 960 and isolationregion 1016 described with respect to FIG. 10.

In at least one embodiment, the NJFET 1200 is manufactured by the aprocess similar to that described with respect to FIGS. 6 and 7A-7D,with the following differences. Specifically, the at least one isolationregion 1296, 1297 is additionally formed in the portion 713 (FIG. 7A)where a source region and a gate region of the NJFET 1200 are to beformed. In at least one embodiment, the at least one isolation region1296, 1297 is formed together with the isolation regions 716, 719 in thesame process, and/or from the same material and/or to the same depth.Other arrangements are within the scope of various embodiments. In oneor more operations, the source enhancement layer 741 is formed in acentral portion surrounded by the at least one isolation region 1296,1297. In one or more operations, the first and second gate regions 751,752 are formed around the at least one isolation region 1296, 1297 (asdescribed with respect to FIG. 10), or on opposite sides of at least oneisolation region 1296, 1297 (as described with respect to FIG. 11). Inone or more operations, the at least one dielectric layer 1261, 1262 isformed over the corresponding at least one isolation region 1296, 1297,to electrically isolate the source and gate contact layers 742 and 753from each other.

Some embodiments provide a PJFET manufacturing process similar to thatdescribed with respect to FIG. 8, with one or more of the differencesdescribed with respect to the manufacturing process of NJFET 1200.

In some embodiments, the provision of a dielectric layer, such as an RPOlayer, over the interface between a gate region and a source/drainregion, and/or the provision of an isolation region between upper partsof the gate region and the source/drain region permit leakage reductionand/or breakdown voltage improvement. In one or more embodiments, one ormore of such arrangements(s) and/or effect(s) are useful insemiconductor devices formed in high-resistivity substrates, such as SOIsubstrates.

According to some embodiments, a JFET comprises a substrate, a sourceregion formed in the substrate, a drain region formed in the substrate,a channel region formed in the substrate, and at least one gate regionformed in the substrate. The channel region connects the source anddrain regions. The at least one gate region contacts one of the sourceand drain regions at an interface, and the at least one gate region isisolated from the other of the source and drain regions. A dielectriclayer covers the interface while exposing portions of the gate regionand the one of the source and drain regions.

According to some embodiments, a semiconductor device comprises asubstrate, and at least one transistor formed in the substrate. The atleast one transistor comprises source and drain regions formed in thesubstrate, first and second gate regions formed in the substrate, and achannel region formed in the substrate. The first and second gateregions are at least partially co-elevational with the source and drainregions. One of the source and drain regions is disposed between thefirst and second gate regions. The channel region connects the sourceand drain regions. An isolation region is arranged between (i) upperparts of the first and second gate regions and (ii) an upper part of theone of the source and drain regions.

In a method of manufacturing a transistor according to some embodiments,an isolation region, a channel region, and source and drain regions areformed in a substrate. In a plan view of the substrate, one of thesource and drain regions is surrounded by the other of the source anddrain regions. A gate region is formed in the substrate. The isolationregion is arranged between the gate region and the one of the source anddrain regions. A dielectric layer is formed over the isolation regionarranged between the gate region and the one of source and drainregions. Contact layers are formed over the corresponding gate, sourceand drain regions. The dielectric layer isolates the contact layer overthe gate region from the contact layer over the one of source and drainregions.

It will be readily seen by one of ordinary skill in the art that one ormore of the disclosed embodiments fulfill one or more of the advantagesset forth above. After reading the foregoing specification, one ofordinary skill will be able to affect various changes, substitutions ofequivalents and various other embodiments as broadly disclosed herein.It is therefore intended that the protection granted hereon be limitedonly by the definition contained in the appended claims and equivalentsthereof.

What is claimed is:
 1. A junction gate field-effect transistor (JFET),comprising: a substrate; a first source/drain region disposed in thesubstrate; a second source/drain region disposed in the substrate; achannel region disposed in the substrate, the channel region connectingthe first source/drain region and the second source/drain region; a gateregion disposed in the substrate, the gate region contacting the firstsource/drain region at a first interface, the gate region isolated fromthe second source/drain region by an isolation region; and a dielectriclayer covering the first interface while exposing a portion of the gateregion and a portion the first source/drain region.
 2. The JFET of claim1, wherein the gate region is configured to cause a depletion region toextend from the first interface into the first source/drain region inresponse to a reverse bias voltage applied to the gate region.
 3. TheJFET of claim 1, wherein the substrate is an 8 Ohmic to 10 Ohmic siliconsubstrate.
 4. The JFET of claim 1, wherein the dielectric layer has awidth in a range from 0.5 μm to 5 μm.
 5. The JFET of claim 1, whereinthe dielectric layer comprises a resist protective oxide (RPO) layer. 6.The JFET of claim 1, wherein the dielectric layer extends around thefirst source/drain region in a plan view.
 7. The JFET of claim 1,wherein the gate region extends around the dielectric layer and thefirst source/drain region in a plan view.
 8. The JFET of claim 1,wherein the second source/drain region extends around the gate region ina plan view.
 9. The JFET of claim 1, further comprising: a first contactlayer over the portion of the gate region; and a second contact layerover the portion of the first source/drain region, wherein thedielectric layer is arranged between the first contact layer and thesecond contact layer, and wherein the dielectric layer is at leastpartially co-elevational with the first contact layer and the secondcontact layer.
 10. The JFET of claim 1, wherein the first source/drainregion comprises a doped region having a same dopant type as the channelregion and a higher dopant concentration than the channel region.
 11. Adevice comprising: a first source/drain region in a semiconductorsubstrate; a gate in the semiconductor substrate surrounding the firstsource/drain region, the gate forming a first interface with the firstsource/drain region; an isolation region surrounding the gate; a secondsource/drain region surrounding the isolation region; a channel regionunder the isolation region and connecting the first source/drain regionto the second source drain region; and a first dielectric layerextending across the first interface between the gate and the firstsource/drain region.
 12. The device of claim 11 further comprising afirst source/drain contact adjacent the first dielectric layer andelectrically connected to the first source/drain region.
 13. The deviceof claim 12 further comprising a first gate contact on an opposing sideof the first dielectric layer as the first source/drain contact, thefirst gate contact electrically connected to the gate.
 14. The device ofclaim 12, wherein the first source/drain contact contacts the isolationregion.
 15. The device of claim 11 further comprising a seconddielectric layer extending across a second interface between the gateand the first source/drain region, a first source/drain contact betweenthe first dielectric layer and the second dielectric layer.
 16. Thedevice of claim 11, wherein the gate comprises a p-type doped region,and wherein the first source/drain region and the second source/drainregion each comprise a n-type doped region.
 17. A semiconductor devicecomprising: a semiconductor substrate; a first source/drain region inthe semiconductor substrate; a gate in the semiconductor substrate anddisposed on opposing sides of the first source/drain region; a firstsource/drain contact electrically connected to the first source/drainregion, the first source/drain contact extending between a firstdielectric layer and a second dielectric layer, each of the firstdielectric layer and the second dielectric layer contacting both thegate and the first source/drain region.
 18. The semiconductor device ofclaim 17 further comprising a gate contact electrically connected to thegate, wherein the first dielectric layer separates the gate contact fromthe first source/drain contact.
 19. The semiconductor device of claim 17further comprising a shallow trench isolation (STI) region extendinginto the semiconductor substrate, the STI region contacting a sidewallof the gate.
 20. The semiconductor device of claim 19 furthercomprising: a second source/drain region in the semiconductor substrate,the second source/drain region separated from the gate by the STIregion; and a channel region under the STI region and extending from thefirst source/drain region to the second source/drain region.